Experiments to assess microelectromechanical systems (MEMS) test their functionality and materials properties. These experiments provide knowledge and insight into MEMS failure modes and potential pathways to improve the lifetime of MEMS devices. This article demonstrates the use of optical microscopy and SEM analysis to determine various causes of failure in MEMS devices.

optical microscopy,microelectromechanical systems,SEM analysis
This content is only available as a PDF.
Copyright © ASM International® 2000
2000
beplay体育官网地址
Topics
Scanning electron microscopy Optical light microscopy Semiconductor wafer fabrication
You do not currently have access to this content.