This article discusses the basic principles of SEM-based cathodoluminescence (CL) spectroscopy and demonstrates its usefulness in process development, statistical process control, and failure analysis. The technologies where the benefits of CL spectroscopy are most evident are compound semiconductor optoelectronics and high electron mobility transistors as reflected in the application examples.

cathodoluminescence,HEMTs,optoelectronic devices,SEM-based CL spectroscopy
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Topics
Microscopy Semiconductor wafer fabrication Test method evaluation Emission spectroscopy
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