Copper wires are susceptible to damage during acid decapsulation and must be protected by stopping the process at the right moment. This article describes the development and evaluation of a method that uses polarization current measurements for end-of-etch detection and subsequent rinse.

acid decapsulation, copper wires, etch stops
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Copyright © ASM International® 2018
2018
ASM International
Topics
Specimen preparation Semiconductor wafer fabrication Copper
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