This article describes an automated sample preparation process for SEM and TEM analysis based on submicron polishing. The method uses robotics, image processing, and a polishing wheel under computer control for a fully automated recipe-driven process that creates exact cross-sections with 0.1 μm accuracy.

sample preparation, submicron polishing
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Copyright © ASM International® 2001
2001
ASM International
Topics
Specimen preparation Transmission electron microscopy Lapping and polishing
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