What is Scanning Probe Microscopy, and How Can it be Used in Failure Analysis?

Tangyunyong, Paiboon; Campbell, Ann

doi:10.31399/asm.edfa.1999-2.p001

Paiboon Tangyunyong;

Paiboon Tangyunyong

Failure Analysis Department, Sandia National Laboratories

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Ann Campbell

Failure Analysis Department, Sandia National Laboratories

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Abstract

Scanning probe microscopy (SPM) refers to a suite of techniques that measure the interaction between a fine probe or tip and a sample in contact or close proximity. These interaction measurements allow the study of properties such as topology, magnetic and electric fields, capacitance, temperature, work function, and friction. The information obtained from SPM plays an important role in IC failure analysis.

scanning probe microscopy

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1999

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What is Scanning Probe Microscopy, and How Can it be Used in Failure Analysis?

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