This article discusses the basic principles of terahertz time-domain spectroscopy (THz-TDS) and the function and limitations of key components in a THz-TDS system. It also provides examples of some of the ways THz-TD imaging is used alone and in combination with other analytical techniques.

terahertz time-domain spectroscopy
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2001
ASM International
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Semiconductor wafer fabrication Spectroscopy
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