This is the second article in a two-part series on deep ultraviolet (DUV) microscopy. The first part, published in the February 2000 issue of EDFA, discusses the working principles and capabilities of the method and the types of applications for which it is suited. In this issue, the author describes the basic design of DUV microscopes, the role of major components, and their effect on imaging quality.

CCD camera, condensing lenses, deep ultraviolet microscopes, laser sources, objective lenses
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Copyright © ASM International® 2001
2001
ASM International
Topics
Optical light microscopy Semiconductor wafer fabrication
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