This article provides an overview of deep ultraviolet (DUV) microscopy, the factors that led to its development, and the types of applications for which it is suited in semiconductor device manufacturing, testing, and inspection. It also includes several images demonstrating it capabilities relative to visible light microscopy.

deep ultraviolet microscopy, imaging systems, UV imaging, wafer inspection
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2000
ASM International
Topics
Optical light microscopy Semiconductor wafer fabrication
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