Microcalorimeter Energy Dispersive X-ray Spectrometer for Low Voltage Microanalysis

Improved X-ray detector technology continues to be a critical need in the semiconductor industry, particularly for high-spatial-resolution X-ray microanalysis using lowbeam-voltage field-emission scanning electron microscopes (FE-SEMs). In response to this need, a prototype microcalorimeter energy-dispersive spectrometer has been developed. This article discusses the capabilities of the new tool and demonstrates its use in thin-film and particle analysis. It also discusses ongoing development efforts and potential future advancements.