Abstract
Virtually all semiconductor materials exhibit Raman scattering which results in a frequency shift in photon energy. In this article, the authors explain how they harness this mechanism to measure the temperature of submicron structures and thereby produce high-resolution temperature maps. They review the basic theory of Raman scattering and present application examples involving high-bandgap materials as well as silicon devices.
This content is only available as a PDF.
Copyright © ASM International® 2009
2009
ASM International
You do not currently have access to this content.
