Energy-Filtered Transmission Electron Microscopy (EFTEM) of Semiconductor Devices

Energy-filtered transmission electron microscopy (EFTEM) is an imaging technique that uses inelastically scattered electrons and energy filters to produce high-quality images and elemental maps. This article reviews the measurement physics of EFTEM, compares and contrasts it with other imaging and chemical analysis techniques, and presents several application examples to demonstrate its use in semiconductor device failure analysis.