Packaging integration continues to increase in complexity, driving more samples into FA labs for development support and analysis. For many of the jobs, there is also a need for larger removal volumes, compounding the demand for tool time and throughput. Focused ion beam (FIB) and dual-beam FIB/SEM systems are helping to relieve the pressure with their ability to create site-specific cross sections and to facilitate gate-level circuit rewire and debug. This article reviews the impact of packaging trends on failure analysis along with recent improvements in FIB technology. It also presents examples that illustrate how these new FIB techniques are being applied to solve emerging packaging challenges.

circuit edit, cross-sectioning, electronic packaging, focused ion beam milling, SEM/FIB systems
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Copyright © ASM International® 2011
2011
ASM International
Topics
Electronic packaging Scanning electron microscopy Milling Semiconductor wafer fabrication
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