Plasma FIB Provides Vital Delayering and Site-Specific Failure Analysis Capabilities for Larger-Scale Structures

Plasma focused ion beam (PFIB) systems can generate ion beams with much higher current and are therefore able to remove larger volumes of material at much faster rates while still maintaining precise control of the beam and its milling action. This article explains how the improved performance of PFIB is leading to new applications in delayering, deprocessing, and site-specific failure analysis.