This article describes an ebook titled STEM-in-SEM: Introduction to Scanning Transmission Electron Microscopy for Microelectronics Failure Analysis, intended as an introductory tutorial for those with little or no transmission imaging experience and as a source of ideas for SEM users looking to expand the imaging and diffraction capabilities of their equipment.

STEM-in-SEM
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Copyright © ASM International® 2020
2020
ASM International
Topics
Scanning transmission electron microscopy Semiconductor wafer fabrication
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