Positron spectroscopy can identify defects deep within metals and semiconductors with a resolution better than a single atomic lattice site. This article discusses the basic principles and implementation of positron annihilation spectroscopy and a key development that makes it more a more useful tool for semiconductor applications.

positron beam spectroscopy, positron interactions, lattice defects
This content is only available as a PDF.
Copyright © ASM International® 2017
2017
ASM International
Topics
Crystal defects Semiconductor wafer fabrication Nondestructive testing Spectroscopy
You do not currently have access to this content.