Optical second-harmonic generation (SHG) is a noninvasive technique that provides information about interface properties and crystal defects. This article demonstrates the use of SGH in the study of high-k dielectrics, silicon-on-insulator structures, compound semiconductors, and through-silicon vias.

copper TSVs, crystal defects, high-k dielectric stacks, interface properties, optical SHG microscopy, second-harmonic generation
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Copyright © ASM International® 2017
2017
ASM International
Topics
Crystal defects Optical light microscopy Semiconductor wafer fabrication Test method evaluation
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