Ex-situ lift out (EXLO) techniques rely on van der Waals forces to transfer FIB milled specimens to various types of carriers using a glass probe micromanipulator. This article describes some of the latest EXLO techniques for site specific scanning transmission electron microscopy, including the use slotted half-grids and vacuum-assisted lift out for plan-view analysis.

ex-situ lift out, slotted half-grids, STEM analysis, vacuum-assisted EXLO
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2018
ASM International
Topics
Specimen preparation Scanning transmission electron microscopy Semiconductor wafer fabrication
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