This article presents and evaluates a calibration method that significantly improves the spectral information that can be extracted from photon emission signals obtained from semiconductor devices. Step-by-step instructions are given for calibrating photon emission microscopes for specific measurements such as device parameters and material band gap. The article also discusses the types of errors that can occur during calibration. Although the procedure presented is used on InGaAs sensors, it applies to all common photon emission detectors.

dispersion characteristics, InGaAs detectors, photon emission detectors, spectral photon emission microscopy, spectral analysis, system calibration
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2022
ASM International
Topics
Infrared sensors Microscopy Semiconductor wafer fabrication Accuracy Sensitivity Test method evaluation
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