Microcalorimeter-based energy-dispersive spectroscopy is a breakthrough in semiconductor material analysis. With an energy resolution of less than 10 eV, it allows the unambiguous identification of elements in the low-energy range (<3 kV) which, until now, required wavelength-dispersive techniques.

composition analysis, energy dispersive X-ray spectroscopy, energy resolution, microcalorimeter EDS
This content is only available as a PDF.
Copyright © ASM International® 2005
2005
ASM International
Topics
Semiconductor wafer fabrication Test method evaluation Energy dispersive X-ray spectroscopy
You do not currently have access to this content.